Sub-Half-Micron Lithography for ULSIs

Sub-Half-Micron Lithography for ULSIs

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Original figures and tables are presented to highlight the key issues and recent developments.q qThis book will be of value to graduate students studying semiconductor-device fabrication, to engineers engaged in such fabrication and to designers of ULSI devices.q--Jacket.Katsumi Suzuki, Shinji Matsui, Yukinori Ochiai. Figure 4.48 HL-800D cell projection optics. 50kV gun Shaping lens Mask stage 1/25 reduction lens Objective lens Beam blanker 1st square aperture CP deflectors VS deflector I x25 silicon mask fanbsp;...


Title:Sub-Half-Micron Lithography for ULSIs
Author: Katsumi Suzuki, Shinji Matsui, Yukinori Ochiai
Publisher:Cambridge University Press - 2000-06-01
ISBN-13:

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