The Global Climate Change
EXPERIMENTAL Figure 1(a) is a schematic diagram of the experimental apparatus used in the present study. ... processing of 6- or 8-inch wafers and consists of a CVD chamber, automatic pressure control (APC) valve, mechanical booster pump and a dry pump. ... An ICP unit (Litmas Blue 1200 manufactured by Litmas) was located at Position A or Position B. The relation between exhaust gas and gasanbsp;...
| Title | : | The Global Climate Change |
| Author | : | Electrochemical Society |
| Publisher | : | The Electrochemical Society - 2001-01-01 |
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